Expertise in the consortium

Fraunhofer Institute for Structural Durability and System Reliability LBF

Project manager

The Fraunhofer Institute for Structural Durability and System Reliability LBF contributes its comprehensive expertise in the synthesis of new, demand-oriented polymers with well-defined compositions through controlled and living polymerizations to the project. These expertises include the production of polymers with specific polymer architectures, such as block and graft copolymers as well as star polymers, and the manufacturing of polymers with a narrow molecular weight distribution. Fraunhofer LBF already holds patents for the synthesis of resist polymers. These core areas of expertise are essential for the development of new resists that are precisely tailored to the manufacturing process and are designed to achieve high resolutions with increased sensitivity.

Fraunhofer Institute for Electronic Nano Systems ENAS

 The Fraunhofer Institute for Electronic Nano Systems ENAS contributes its expertise in the manufacture of electronic nanosystems to the project. ENAS focuses on optimizing lithographic process steps in order to further increase the performance of e-beam lithography. In this context, the main components of the resist, including the photosensitive components and the solvent, are realized in the context of sustainability. The collaboration between LBF and ENAS is essential for the development of new, high-performance resists and the optimization of lithographic process steps.